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Integrated management with an in-situ real time monitor "DIGI Series" for next-generation thin-film processes
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.
High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.
The fast response digital flow meter using differential-pressure measurement method, response time: 100 msec ( or less than 0.8 sec when it is used in combination with a piezo valve).
The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.
This dissolved ozone concentration monitor is able to cover a broad measuring range from low concentrations to high concentrations.
This is an oxygen and nitrogen elemental analyzer with high accuracy and repeatability suiting to cutting-edge technology's R&D as well as quality control in the market of steel, new materials, catalyst and so on. This is a new generation model optimized to fit to user's requests.
Das Rauchgas-Analysegerät der Baureihe ENDA-5000 ist ein Meßsystem, das kontinuierlich die Konzentration von NOX, SO2, CO, CO2 und O2 im Rauchgas einer ortsfesten Emissionsquelle überwacht.Es können gleichzeitig bis zu 5...
Das tragbare E-51 bestimmt die Leitfähigkeit, den elektrischen Widerstand und den Salzgehalt in wässrigen Lösungen.
The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.