Compact Reticle/Mask Particle Detection System PR-PD3

Low running costs thanks to a compact design, plus remarkable versatility

LA 930

The LA-930 uses Mie Scattering (laser diffraction) to measure particle size of suspensions or dry powders. The speed and ease-of-use of this technique makes it the most popular for many applications.

LB550

The LB-550, using a dynamic light scattering technique, is able to measure very concentrated suspensions, up to 40% solids in many cases, over a size range of 1nm-6µm.

PR-PD5 Particle detection system

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

The series can complete engine/vehicle certification testing in the latest regulations, Euro 5/6 and Euro VI.

PR-PD2HR Particle detection system

Achieves dramatic cost reductions in advanced mask inspections

HORIBA's PR-PD2 Particle Detection System

High sensitive particle detection down to 0.35µm.