Ellipsometers

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Auto SE Vision System

The Auto SE integrates a unique and patented MyAutoView Vision System that is mounted within the standard ellipsometer optics.

MyAutoView allows the operator to view the sample spot at all times, and for all sample types to ensure that the measurement is made at exactly the right position with the right spot size.

The image provided has a field of view of approximately 1mm and a resolution of 10 µm.

For many cases this feature is mandatory.

Sample type

Advantages of the MyAutoView Vision System

Examples

A patterned sample

Direct visualization of the measurement spot on the pattern area.

A sample having spots deposited on the surface

Direct visualization of the measurement spot on the sample to optimise measurement position.

A transparent sample

- Direct selection of the front reflection only
- Calculation of the degree of backside reflection for cases where the backside reflection cannot be eliminated

A rough sample, or an inhomogeneous surface (stripe, stain)

Direct visualization of the measurement spot on the sample to optimise measurement position.

A microstructured sample

Direct visualization of the measurement spot on the sample to characterise the 0.8 mm line feature

A sample with a cylindrical or spherical shape

Direct visualization of the plane surface for positioning of the spot on this area. The image on the right shows that the spot is not optimally positioned, and is still on the spherical surface.

Sample placed inside accessories such as a liquid cell, temperature controlled stage…

Easy positioning of the measurement on a sample placed inside a liquid cell (this example).