Crystalline Silicon

EMGA-930 is a simultaneous Oxygen/Nitrogen/Hydrogen Analyzer with high accuracy and repeatability suited to advanced R&D as well as quality control. It determines the O/N/H contained in ferrous and non-ferrous metals, ceramics, new materials, electronic materials and other inorganic materials using the inert gas fusion method.

EMAX ENERGY combined with SEM is an energy dispersive X-ray analyzer which is suited for foreign material and composition analysis. It matches the samples in many applications.

Analyzer is designed to provide pertinent...

The Ultima Expert is specially designed to handle the most challenging applications and offers the highest performance on the market with unrivaled resolution, high sensitivity and unique stability.

Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.

EMAX ENERGY combined with SEM is an energy dispersive X-ray analyzer which is suited for foreign material and composition analysis. It matches the samples in many applications.

Analyzer is designed to provide pertinent...

High spectral resolution analytical Raman microscope for ultimate performance and flexibility; includes UV Raman configuration, full automation and wide range of accessories.

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.

The application of photoluminescence for the quality...

Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.

Resistivity meter having the 2-channel carbon sensor. Measurement range: 0 - 100.0 MΩ・cm

CODA-500: High-Performance Automatic COD_MN Monitor Created Through Advanced Technology and More Than 30 Years of Accumulated Expertise

Measures the conductivity ranging from purified water up to 2000 µS/cm for pharmaceuticals, food, and cosmetics applications

Measure the ultra-low density of silica at the finest sensitivity of 0.01 µg/L (0.01 ppb).

The IF-250 Simple Fluoride Ion Monitor for use in industry provides continuous measurements of the free fluoride ion concentration in waste water and other test samples using the fluoride ion electrode method.

The unit can be used on a range of test samples with varying concentrations from 0.0 to 10.0 mg / L up to 0 to 10,000 mg / L. This makes the IF-250 the ideal unit for monitoring the treatment of waste water and effluent resulting from the semiconductor production process, as well as electronic and glass factories using fluoride in the production process.

A state-of-the-art model adopting 60 years of water measurement technology, which achieves a reduction in life cycle costs, and compliance with regulations and corporate compliance.

The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.

Compact process gas monitor using quadrupole mass spectrometer. Monitors trace gases, responds quickly to process shift . Easy to install and maintain.

HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3. This Auto Refill System achieves higher uptime, cost reduction, improved process stability and higher safety.

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

Automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.

High senility in-line gas monitor of SiF4 and CF4 for chamber cleaning end point monitoring in deposition process. Reduce clean time and gas usage by real-time monitoring.

In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.