Photovoltaic

High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

MP-32S/M requires SEM as excitation source and it can evaluate defects, impurities and crystalline construction in micro region.

MR-VS series are new special instruments for spectrum measurement which employ compact spectrograph and optical fiber.

Easy measurement of cathodoluminescence spectrograph by mounting to SEM.

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.

The application of photoluminescence for the quality...

The PHOTOLUMINOR-S has been designed for R&D in many applications and provides high performance and easy operation.   High-sensitivity measurement is important for detecting weak photoluminescence...

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.

High-speed response and compact profile of the CS-131, SC-1 (standard clean) Solution Concentration Monitor makes it the ideal choice for single wafer and batch type cleaning devices.

High-speed response and compact profile make the SC-2 Solution Concentration Monitor the ideal choice for wafer and batch-type cleaning devices