Exhaust Pressure Controller EC-5000 Series

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

Fiber Optic Type Chemical Concentration Monitor CS-100F1 Series

Support for multi-batu, single-bath, and dingle-wafer cleaning systems

FluoroCube - Compact Lifetime Spectrofluometer Systems

The FluoroCube includes an advanced, miniature light source and detector, for the most flexible photon-counting lifetime fluorimeter available today.

FluoroHub - Single Photon Counting Controller

The FluoroHub is a semi-modular product that brings together the best technology from a number of major manufacturers to achieve the most dependable performance available, with full control under Windows software.

Fluorolog - Modular Spectrofluorometer

The Fluorolog®-3 spectrofluorometer is the ultimate in modular research system, designed to perform analyses over the ultraviolet and visible regions of the spectrum as well as far into the IR.

FluoroMax - Compact Spectrofluorometer

The FluoroMax is a compact spectrofluorometer from HORIBA Scientific, yet it offers the ultimate sensitivity in fluorescence investigations as well as features not found in most table-top fluorescence detection systems.

FPM Monitor / CS-153

24-hour real-time monitoring of FPM solution concentrations in semiconductor wet-etching processes

GA-370 Trace Gas Monitor

GA-370 : Continuous and ultrahigh-sensitivity measurement of trace impurities (CO, CO2and CH4) in high-purity gas.

 

IPA Concentration Monitor IR-150AS

The IR-150 is designed for real time inline concentration measurement using a Non-dispersive infrared (NDIR) method

GD-Profiler

The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.