Mixed Injection System MV-2000

High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

Piezo Actuator Valve PV Series

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.

Standard Clean 1 (SC-1) chemical concentration monitor image

High-speed response and compact profile of the CS-131, SC-1 (standard clean) Solution Concentration Monitor makes it the ideal choice for single wafer and batch type cleaning devices.

Appearance of CS-152, SC-2 monitor

High-speed response and compact profile make the SC-2 Solution Concentration Monitor the ideal choice for wafer and batch-type cleaning devices

SEC-E series mass flow controllers

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

SpectrAcq2

The SpectrAcq2 is not just another readout system - it's a compact, high speed, high performance spectral data acquisition controller designed for advanced spectroscopy and light measurement applications.

SPM Monitor image

High-speed response and compact profile make the SPM Solution Concentration Monitor the ideal choice for water and batch type cleaning devices

Symphony II CCD Detectors

The Symphony® II line of CCD detectors is a family of array detectors from HORIBA Scientific, the world leader in optical spectroscopy. Because of their unique combination of outstanding sensitivity, high speed, low noise, ruggedness and durability, all in compact and economical packages, these array detectors have totally revolutionized spectroscopic detection with the ultimate performance for a wide range of spectroscopic applications.