Exhaust Pressure Controller EC-5000 Series

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

Fiber Optic Type Chemical Concentration Monitor CS-100F1 Series

Support for multi-batu, single-bath, and dingle-wafer cleaning systems

FPM Monitor / CS-153

24-hour real-time monitoring of FPM solution concentrations in semiconductor wet-etching processes

Gemini 180 Monochromator

The Gemini 180 is a fully automated, double additive grating scanning monochromator. The incorporation of toroidal optics provides for optimum throughput and spectral resolution. It is ideal for applications that require low stray light and illumination including Transmission, Absorbance, Reflectance, and Fluorescence.

H-20 Monochromator

The use of a concave aberration corrected holographic grating simplifies the optical configuration of the H-20 monochromator in comparison to conventional monochromators.

CS-153N HF/HNO3 Monitor

24-hour real-time monitoring of HF/HNO3 solution concentrations in semiconductor wet-etching processes

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.

High Temperature Digital Mass Flow Controller SEC-8000 F/D/E

The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.

High temperature mass flow controllers / meters

A best-seller mass flow controller for high temperature environments