Highly Sensitive Silica Monitor SLIA-300

用于超纯水的二氧化硅分析,具有小巧且高灵敏度的新性能。

 

 

 

Hydrofluoric Acid Monitor CM-200A/210A

实时显示半导体制造工艺中的氢氟酸浓度

iHR320 Imaging Spectrometer

iHR320提供了这样一种平台, 通过它可以容易实现当前和今后多年的光谱测量需求.

iHR550 Imaging Spectrometer

The iHR550 spectrometer offers a unique combination of spectral quality, flexibility, robustness, and ease of use that makes it the ideal general-purpose spectrometer for performing spectral measurements with quality results.

In-line type Dissolved Ozone Monitor OZ-96i

监测半导体制造工艺中清洗、形成氧化膜等作业中所使用的臭氧水浓度。它是直接安装在主配管中、可以进行连续监测的臭氧水浓度监测仪。不需要用旁通管路来进行检测。本产品通过臭氧发生装置以及对使用点进行近似测量。

InGaAs Array Detector

The HORIBA Jobin Yvon family of NIR array detectors, the Symphony Series, feature spectroscopic grade InGaAs detectors in a linear array of 512 or 1024 pixels.

MicroHR Spectrometer

MicroHR是一种短焦距的Czerny-Turner型光谱仪,它可用作成像摄谱仪或扫描式单色仪。用作摄谱仪时,入口可装固定或可调的狭缝,出口配有独特的CCD予调焦的适配器

Motorized MicroHR Spectrometer

和成像摄谱仪或者扫描单色仪一样,新型的自动MicroHR允许用户实现快速精确的测量,以及其他类似焦距的光谱仪无法提供的多种用途。

MicroHR NIR Spectrometer

The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.

MP-32S/M

MP-32S/M requires SEM as excitation source and it can evaluate defects, impurities and crystalline construction in micro region.