
Application
质量控制
监测半导体制造工艺中清洗、形成氧化膜等作业中所使用的臭氧水浓度。它是直接安装在主配管中、可以进行连续监测的臭氧水浓度监测仪。不需要用旁通管路来进行检测。本产品通过臭氧发生装置以及对使用点进行近似测量。
The LA-930 uses Mie Scattering (laser diffraction) to measure particle size of suspensions or dry powders. The speed and ease-of-use of this technique makes it the most popular for many applications.
MP-32S/M requires SEM as excitation source and it can evaluate defects, impurities and crystalline construction in micro region.
MR-VS series are new special instruments for spectrum measurement which employ compact spectrograph and optical fiber.
Easy measurement of cathodoluminescence spectrograph by mounting to SEM.









