Application
材料&性能描述
The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.
MP-32S/M requires SEM as excitation source and it can evaluate defects, impurities and crystalline construction in micro region.
MR-VS series are new special instruments for spectrum measurement which employ compact spectrograph and optical fiber.
Easy measurement of cathodoluminescence spectrograph by mounting to SEM.
Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.
The application of photoluminescence for the quality...
The PHOTOLUMINOR-S has been designed for R&D in many applications and provides high performance and easy operation. High-sensitivity measurement is important for detecting weak photoluminescence...
PR-PD2是通过激光散射方式对曝光工艺中光掩模上的细小颗粒进行检测的装置。可检测光掩模图案面(Pattern Surface)上的最小粒径为0.35μm。并且通过线＆空间1.0〜1.5μm的图案识别功能，可以把检测误差抑制在最低限度。
