MicroHR NIR Spectrometer

The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.

高性能载气式液体汽化器 MV-2000 Series

MV-2000系列实现高效的汽化,即使在低温情况下也可通过螺旋式加热达到汽化效果。此种汽化方式适用于半导体制造工艺,诸如“High-k”——一种易热解的液体源

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

通过气液混合气化方式实现了液体材料的高效率气化

MP-32S/M

MP-32S/M requires SEM as excitation source and it can evaluate defects, impurities and crystalline construction in micro region.

MP-VS series

MR-VS series are new special instruments for spectrum measurement which employ compact spectrograph and optical fiber.

Easy measurement of cathodoluminescence spectrograph by mounting to SEM.

多范围/多气体的数字式质量流量控制器 SEC-Z500X

提供多气体,多量程的解决方案,是HORIBA销量第一的气体质量流量控制器。高精度,快速响应,轻巧的尺寸。全金属

PHOTOLUMINOR-D

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.

The application of photoluminescence for the quality...

PHOTOLUMINOR-S

The PHOTOLUMINOR-S has been designed for R&D in many applications and provides high performance and easy operation.   High-sensitivity measurement is important for detecting weak photoluminescence...

Piezo Actuator Valve PV Series

它内置有高速响应的压电阀,接气部采用了全金属构造,最适于超清洁类型的高纯度气体供应系统。

通过金属封口方式实现了超低泄漏

不仅可进行气体的流量控制,而且还可以进行液体的流量控制

Standard Clean 1 (SC-1) chemical concentration monitor image

适合于使用单槽或多槽方式的清洗装置

外形小巧、响应快速的SC-1溶液浓度计