High temperature mass flow controllers / meters

适用于高温环境的质量流量计

High temperature mass flow controllers / meters

通过气液混合气化方式实现液体材料的高效率气化

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.

SEC-E series mass flow controllers

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor

Hydrofluoric Acid Monitor CM-200A/210A

实时显示半导体制造工艺中的氢氟酸浓度

Real time interferometric endpoint for depth targeting.

LA 930

The LA-930 uses Mie Scattering (laser diffraction) to measure particle size of suspensions or dry powders. The speed and ease-of-use of this technique makes it the most popular for many applications.

SEC-E40/50MK3

适用于从微小流量到大流量控制的低成本型号

SEC-6470 6480

大流量(〜1000SLM)气体流量控制器