Industry
Lithography
The LA-930 uses Mie Scattering (laser diffraction) to measure particle size of suspensions or dry powders. The speed and ease-of-use of this technique makes it the most popular for many applications.
The UVISEL VUV ellipsometer provides the best combination of superior VUV performance and experimental flexibility to determine thin film thickness and optical constants across the wavelength range 142 to 880 nm.
UVISEL ER扩展波段光谱型椭圆偏仪覆盖从190到2100纳米的宽光谱范围。
UVISEL FUV光谱型椭偏仪将UVISEL VIS的工作波段扩展到190nm。
The UVISEL VIS spectroscopic ellipsometer covers the spectral range from 210 to 880 nm, and can be easily extended in both FUV and NIR range (see UVISEL FUV and NIR models). The measurement is performed in a few minutes and is extremely repeatable.
