Industry
Metrology
The UVISEL VIS spectroscopic ellipsometer covers the spectral range from 210 to 880 nm, and can be easily extended in both FUV and NIR range (see UVISEL FUV and NIR models). The measurement is performed in a few minutes and is extremely repeatable.
UVISEL NIR光谱型椭偏仪将UVISEL VIS的工作波段扩展到近红外2100nm
UVISEL FUV光谱型椭偏仪将UVISEL VIS的工作波段扩展到190nm。
UVISEL ER扩展波段光谱型椭圆偏仪覆盖从190到2100纳米的宽光谱范围。
The UVISEL VUV ellipsometer provides the best combination of superior VUV performance and experimental flexibility to determine thin film thickness and optical constants across the wavelength range 142 to 880 nm.
Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor
产品:
UVISEL VIS: 210-880 nm
UVISEL FUV: 190-880 nm
UVISEL NIR: 245-2100 nm
UVISEL ER: 190-2100 nm
UVISEL VUV: 142-880 nm
测量薄膜厚度和光学常数。用于研究和工艺发展.
