Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

SEC-E series mass flow controllers

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

Water Distribution Monitor

Das TW-100 misst den Trübungsgrad, den Anteil freier Chloridionen, die Farbe und den Druck von Fabrikations- und Trinkwasser.

Wafer Back Side Cooling System GR-300 Series

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.