Analysis based on
electrochemistry reaction

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

Multi-Component Gas Analyzer VA-5000 Series is an all-round analyzer that fits today’s measurement needs ...

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.