Manufacturing

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.

High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.

The fast response digital flow meter using differential-pressure measurement method, response time: 100 msec ( or less than 0.8 sec when it is used in combination with a piezo valve).

The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.

This dissolved ozone concentration monitor is able to cover a broad measuring range from low concentrations to high concentrations.

This is an oxygen and nitrogen elemental analyzer with high accuracy and repeatability suiting to cutting-edge technology's R&D as well as quality control in the market of steel, new materials, catalyst and so on. This is a new generation model optimized to fit to user's requests.

The ENDA-5000 series are superior continuous analysis systems that are perfect in the difficult field of exhaust gas measurement and can monitor up to five components, thanks to HORIBA's innovative optical technology.

This conductivity meter measures conductivity, resistivity and salt in water solutions. It is a field type, with a waterproof case, and is easy to hold and move. It enables anyone to conduct high-precision measurement, anytime...

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

Support for multi-batu, single-bath, and dingle-wafer cleaning systems