Application
Thin Film Control & Analysis
Featured Products
Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor
The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...
The EC-5000 series exhaust pressure controller can maintain a consistent pressure...
Best-selling, compact baking system suitable for a range of liquid source delivery applications. Easy maintenance.
Integrated management with an in-situ real time monitor "DIGI Series" for next-generation thin-film processes
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.
High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.
The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.
The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.
The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.