LA-350 photo

The compact LA-350 uses Mie scattering (laser diffraction) to measure particle size quickly and easily. The speed and ease of this technique makes it popular for most particle sizing applications

 

PHOTOLUMINOR-D

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.

The application of photoluminescence for the quality...

PHOTOLUMINOR-S

The PHOTOLUMINOR-S has been designed for R&D in many applications and provides high performance and easy operation.   High-sensitivity measurement is important for detecting weak photoluminescence...

Piezo Actuator Valve PV Series

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.

PR-PD2HR Particle detection system

Achieves dramatic cost reductions in advanced mask inspections

HORIBA's PR-PD2 Particle Detection System

High sensitive particle detection down to 0.35µm.

Standard Clean 1 (SC-1) chemical concentration monitor image

High-speed response and compact profile of the CS-131, SC-1 (standard clean) Solution Concentration Monitor makes it the ideal choice for single wafer and batch type cleaning devices.

Appearance of CS-152, SC-2 monitor

High-speed response and compact profile make the SC-2 Solution Concentration Monitor the ideal choice for wafer and batch-type cleaning devices

SEC-E series mass flow controllers

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

SpectrAcq2

The SpectrAcq2 is not just another readout system - it's a compact, high speed, high performance spectral data acquisition controller designed for advanced spectroscopy and light measurement applications.