Featured Products

1250M Spectrometer

The 1250M is the spectrometer of choice for highest resolution spectroscopy whether your samples are gases, semiconductors, lasers or something else.

750M Spectrometer

The 750M delivers the resolution of a typical 1.0 metre spectrometer and the throughput of a smaller instrument in a convenient package.

APHA-370 Ambient THC monitor

The APHA-370 continuously monitors atmospheric THC, NMHC, and CH4 concentrations...

APMA-370 Carbon Monoxide monitor

The APMA-370 is a device for continuously monitoring CO concentrations using a coss-modulation NDIR...

 

Automatic pressure regulators

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

BHF monitor image

The CS-137 offers reliable, unobtrusive round the clock, real-time monitoring of BHF solution concentrations primarily used for wet etching in semiconductor processes.

Carbon Sensor Resistivity Meter HE-960R-GC(W)

Carbon sensor resistivity meter. Measurement range: 0 - 100.0 MΩ・cm

Compact Reticle/Mask Particle Detection System PR-PD3

Low running costs thanks to a compact design, plus remarkable versatility

Appearance of DigiCPMJ

Integrated management with an in-situ real time monitor "DIGI Series" for next-generation thin-film processes

Digital Auto Pressure Regulator

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.