Semiconductor

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

The EC-5000 series exhaust pressure controller can maintain a consistent pressure...

The economy mass flow controller installed with thermal valve.

High precision flow rate measurement with one-touch operation.

The MFT-20 mass flow checker is a useful tool for equipment engineers to prove a fault with a mass flow controller before removing it.

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.